DEEP X-RAY-LITHOGRAPHY FOR MICROMECHANICS VIA SYNCHROTRON-RADIATION

Authors
GUCKEL H
Citation
H. Guckel, DEEP X-RAY-LITHOGRAPHY FOR MICROMECHANICS VIA SYNCHROTRON-RADIATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 79(1-4), 1993, pp. 247-248
Citations number
2
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
79
Issue
1-4
Year of publication
1993
Pages
247 - 248
Database
ISI
SICI code
0168-583X(1993)79:1-4<247:DXFMVS>2.0.ZU;2-4
Abstract
Micromechanics is an emerging field with many applications in microsen sors and microactuators. The processing too which is needed for these devices must produce three-dimensional structures from many materials with submicron tolerances. Synchrotron based X-ray lithography can be used to fabricate photoresist molds with structural heights to 500 mum and nearly perfect edge acuity. The plastic molds can be converted to metal molds via electroplating. Fabricated metal parts can be assembl ed to form complex structures. An example of this technique is a fully functional planar, magnetic micromotor which has been fabricated and is in the testing phase.