A HEAVY-ION MICROPROBE AND ITS APPLICATION TO MULTIDIMENSIONAL PROCESSING AND ANALYSIS

Authors
HORINO Y MOKUNO Y KINOMURA A CHAYAHARA A KIUCHI M FUJII K
Citation
Y. Horino et al., A HEAVY-ION MICROPROBE AND ITS APPLICATION TO MULTIDIMENSIONAL PROCESSING AND ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 79(1-4), 1993, pp. 424-427
Citations number
9
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
79
Issue
1-4
Year of publication
1993
Pages
424 - 427
Database
ISI
SICI code
0168-583X(1993)79:1-4<424:AHMAIA>2.0.ZU;2-A
Abstract
The development of a heavy ion microprobe system and its applications are being studied al GIRIO. The minimum beam spot size of 3 mum x 3 mu m was achieved for various ions with energies in the range of 0.4-6 Me V by a focusing system which is combined with a tandem-type accelerato r. This system allows us to perform microprocesses such as maskless Me V ion implantation and microanalysis using heavy ion microprobes. Some applications of the heavy ion microprobe are presented.