M. Riabkinafishman et J. Zahavi, EFFECT OF PROCESSING CONDITIONS ON SUPERCONDUCTIVE PROPERTIES OF LASER-DEPOSITED YBCO THIN-FILMS, Journal of Materials Science, 28(12), 1993, pp. 3298-3302
Thin superconductive films of YBa2Cu3O7-x have been deposited on (1 00
) single crystal SrTiO3 substrates by using technique of ArF pulse exc
imer laser evaporation of bulk YBCO target in a vacuum, followed by sl
ow cooling in an oxygen atmosphere. Thin-film properties are strongly
influenced by the processing conditions. The effect of pulse repetitio
n rate, beam power, beam size on the target surface and oxygen pressur
e on the surface morphology and superconductive properties of deposite
d films has been investigated. Film characterization has been performe
d by using X-ray diffractometry, scanning electron microscopy and four
-point probe electrical instruments.