SYNTHESIS OF ND(FETI)12 FILMS BY SPUTTERING

Nd(FeTi)12 films have been synthesized by dc magnetron sputtering. The films have tetragonal ThMn12 crystal structure as confirmed by XRD an d magnetic measurements. The lattice parameters are a=8.57 and c=4.801 angstrom. The degree of the ThMn12 phase formation and the texture of the films are found to be dependent on deposition parameters. The fil ms can be aligned with the (001) basal plane in the film plane by suit able deposition conditions. Thus the films are textured so that the ea sy axis, which is the c-axis, is perpendicular to the film plane. Afte r nitrogenation, the tetragonal ThMn12 crystal structure is retained a nd the lattice parameters increase to a=8.67 and c=4.862 angstrom, cor responding to a volume expansion of 3.6%. The coercivity also increase s upon nitrogenation.