MICROPLASMAS IN EPITAXIAL GAP P-N-STRUCTU RES GROWN ON SI SUBSTRATES

Authors
ZHILYAEV YV KONDRATEV BS NAZAROV N TUTYGIN VS FEDOROV LM
Citation
Yv. Zhilyaev et al., MICROPLASMAS IN EPITAXIAL GAP P-N-STRUCTU RES GROWN ON SI SUBSTRATES, Pis'ma v Zurnal tehniceskoj fiziki, 19(6), 1993, pp. 14-19
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Pis'ma v Zurnal tehniceskoj fiziki → ACNP
ISSN journal
03200116
Volume
19
Issue
6
Year of publication
1993
Pages
14 - 19
Database
ISI
SICI code
0320-0116(1993)19:6<14:MIEGPR>2.0.ZU;2-Q