GROWTH OF TEXTURED ZNO-IN THIN-FILMS BY CHEMICAL SPRAY DEPOSITION

Authors
OLVERA MD MALDONADO A ASOMOZA R KONAGAI M ASOMOZA M
Citation
Md. Olvera et al., GROWTH OF TEXTURED ZNO-IN THIN-FILMS BY CHEMICAL SPRAY DEPOSITION, Thin solid films, 229(2), 1993, pp. 196-200
Citations number
25
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
229
Issue
2
Year of publication
1993
Pages
196 - 200
Database
ISI
SICI code
0040-6090(1993)229:2<196:GOTZTB>2.0.ZU;2-V
Abstract
Indium-doped zinc oxide thin films were grown using the chemical spray deposition technique and different doping compounds in the starting s olution. In particular, indium chloride, indium sulfate and indium ace tate were used as indium sources. The films show a high degree of pref erential crystalline orientation which depends mainly on the type of d oping compound and the substrate temperature. The lowest value of the resistivity is 2 x 10(-3) OMEGA cm and the transmittance is on average higher than 90%. It was found that the texture of the films could be changed quite easily making it possible to grow films for different ap plications.