PROPERTIES OF AU SIO2/A-SIH SOLAR-CELLS WITH WET OXIDE/

Results are presented of a study of Au/SiO2/a-Si: H MIS solar cells em ploying wet-chemical oxides. The tunnel oxide can improve or deteriora te the parameters of the solar cell, depending on the oxidation time a nd on the percentage of the H2O2/water solution during the oxidation. We use the difference in optical subgap absorption, determined by phot othermal deflection spectroscopy and by the constant photocurrent meth od, to follow the density of interface states N(ss) as a function of o xidation time. In all cases, N(ss) goes through a maximum as a functio n of time.