SURFACE-TREATMENT OF GLASS AND CERAMICS USING XECL EXCIMER-LASER RADIATION

A XeCl excimer laser with uniform beam profile and 308 nm wavelength w as used for ablation and surface modification of technical glasses and ceramics. The ablation behaviour and the resulting surface morphology of the different materials were measured in dependence upon the energ y density and the number of pulses. In contradiction to ceramics, glas ses show a higher ablation threshold and considerable higher ablation rates. Due to the short wavelength of the excimer laser, microstructur ing of glass and ceramic surfaces is possible. Examples are presented, like marking of glasses, microline structuring of float glass, as wel l as positive and negative microstructuring of ceramics.