DEMONSTRATION OF A WAVE-GUIDE LENS MONOLITHICALLY INTEGRATED WITH A LASER-DIODE BY COMPOSITIONAL DISORDERING OF A QUANTUM-WELL

Authors
HIRATA T SUEHIRO M HIHARA M DOBASHI M HOSOMATSU H
Citation
T. Hirata et al., DEMONSTRATION OF A WAVE-GUIDE LENS MONOLITHICALLY INTEGRATED WITH A LASER-DIODE BY COMPOSITIONAL DISORDERING OF A QUANTUM-WELL, IEEE photonics technology letters, 5(6), 1993, pp. 698-700
Citations number
9
Categorie Soggetti
Optics,"Physics, Applied
Journal title
IEEE photonics technology letters → ACNP
ISSN journal
10411135
Volume
5
Issue
6
Year of publication
1993
Pages
698 - 700
Database
ISI
SICI code
1041-1135(1993)5:6<698:DOAWLM>2.0.ZU;2-R
Abstract
An elliptic waveguide lens is monolithically integrated with a GaAs/Al GaAs distributed feedback laser diode and a grating output coupler by electron beam lithography, ion implantation, and two-step metalorganic vapor phase epitaxy. The waveguide lens is formed by etching of a pat terning layer in order that the fabrication process of the waveguide l ens is compatible with that of the laser diode. Collimated output ligh t is directly obtained from a semiconductor substrate using this waveg uide lens and a grating output coupler.