ELECTRON-PARAMAGNETIC-RESONANCE OF MOLECULAR-HYDROGEN IN SILICON

In briefly annealed silicon samples implanted with hydrogen and deuter ium an electron paramagnetic resonance spectrum is detected. It is ide ntified as arising from a hydrogen molecule oriented in the [111] crys tallographic direction and located most probably at an interstitial si te. Such a result is consistent with recent theoretical calculations p redicting such an orientation to be of lowest energy. In addition, evi dence is obtained indicating that the hydrogen molecule forms a part o f a more elaborate hydrogen cluster.