ANALYSIS USING HIGH-ENERGY BEAM TECHNIQUES OF THE SURFACE CARBONACEOUS LAYERS OF SILICON AND TANTALUM SUBSTRATES USED IN THE CHEMICAL-VAPOR-DEPOSITION SYNTHESIS OF DIAMOND
Ml. Terranova et al., ANALYSIS USING HIGH-ENERGY BEAM TECHNIQUES OF THE SURFACE CARBONACEOUS LAYERS OF SILICON AND TANTALUM SUBSTRATES USED IN THE CHEMICAL-VAPOR-DEPOSITION SYNTHESIS OF DIAMOND, DIAMOND AND RELATED MATERIALS, 2(10), 1993, pp. 1365-1369
Data on the elemental composition and thickness of the carbonaceous la
yers generated during hot-filament chemical vapour deposition of diamo
nd on Si(100) and polycrystalline tantalum substrates were gathered by
the combined use of Rutherford backscattering spectrometry (RBS) carr
ied out with H-1+ and He-4+ beams and nuclear reaction analysis employ
ing the C-12(d,p)C-13 reaction. Determination of the layer thicknesses
required the combined use of RBS and secondary ion mass spectroscopy
analysis in depth profiling mode. The total amount of carbon deposited
onto the substrates was found to depend on the process temperature, f
ollowing different trends for silicon and for tantalum. The amounts of
hydrogen and oxygen incorporated in the deposits were measured by the
reactions H-1(N-15,alpha gamma)C-12 and O-16(d,p)O-17 respectively,
and the results correlated with the thickness of the carbonaceous laye
rs.