CORROSION-RESISTANT COATINGS (AL2O3) PRODUCED BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION USING ALUMINUM-TRI-SEC-BUTOXIDE

Citation
Vac. Haanappel et al., CORROSION-RESISTANT COATINGS (AL2O3) PRODUCED BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION USING ALUMINUM-TRI-SEC-BUTOXIDE, Thin solid films, 230(2), 1993, pp. 138-144
Citations number
30
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
ISSN journal
00406090
Volume
230
Issue
2
Year of publication
1993
Pages
138 - 144
Database
ISI
SICI code
0040-6090(1993)230:2<138:CC(PBM>2.0.ZU;2-R
Abstract
The metal organic chemical vapour deposition (MOCVD) of amorphous alum ina films on steel was performed in nitrogen at atmospheric pressure. This MOCVD process is based on the thermal decomposition of aluminium- tri-sec-butoxide (ATSB). The effect of the deposition temperature (wit hin the range 290-420-degrees-C), the precursor vapour pressure (5.33 x 10(-3)-2.67 x 10(-2) kPa), and the gas flow (6.5-12.51 min-1) of the MOCVD process have been studied in relation to corrosion properties a t high temperatures. The corrosion experiments were performed at 450-d egrees-C in a gas atmosphere containing 1% H2S, 1% H2O, 19% H-2, and b alanced Ar. It was found that the amount of corrosion products on an a lumina film (0.20 +/- 0.05 mg cm-2)-AISI 304 combination decreased wit h increasing deposition temperature of the coating. This was more pron ounced for the products formed through the coating owing to a certain porosity. The crack density, where products were also formed, was almo st unaffected.