PREPARATION AND CHARACTERIZATION OF YBA2CU3O7-X HIGH-TC SUPERCONDUCTING THIN-FILMS DEPOSITED BY S-GUN SPUTTERING

We have prepared YBa2Cu3O7-x high T(c) superconducting (HTS) thin film s on (100) yttria-stabilized zirconia (YSZ) and LaAlO3 (LAO) substrate s, using a 2 kW S-gun in an off-axis mode. By varying the temperature of the substrates, films with a axis and c axis orientations were read ily obtained. The X-ray diffraction pattern and Laue pattern confirmed that films with a axis orientation exhibited a single-crystal texture . All films had a good mirror-like surface. For films grown on YSZ sub strates, scanning electron microscopy (SEM) revealed a clear distincti on between the surfaces of the films grown at various temperatures (52 0-780-degrees-C). Films grown on LAO substrates exhibited even smoothe r and flatter surfaces. The SEM changes will be discussed in correlati on with J(c). The best HTS thin films were obtained on LAO substrates at a temperature of 820-degrees-C, with T(c) = 89 K and J(c) = 1 x 10( 6) A cm-2 (77 K).