Gd. Tantsyrev et Gy. Lyapin, SECONDARY-EMISSION SOURCE OF NEGATIVE OXYGEN AND HALOGEN IONS, Instruments and experimental techniques, 36(1), 1993, pp. 122-124
A source of atomic oxygen and halogen negative ions is described. The
ions are generated by secondary ion emission from a target made of met
al oxide or a halogen salt. The cathode target is bombarded by positiv
ely charged ions produced in a gas discharge. For O-, Cl-, and F- ions
the current of a beam 1 mm in diameter was approximately 0.1 muA. The
ion energy dispersion was no more than several electronvolts, and the
content of other ion impurities was a few percent.