INDUSTRIAL-EQUIPMENT FOR STUDYING A SURFACE BY LOW-ENERGY ION-SCATTERING AND AUGER-SPECTROSCOPY

Equipment for studying the element composition of a surface by low-ene rgy ion scattering and Auger spectroscopy is described. The equipment can do a qualitative element analysis of a surface in layers by combin ing two methods without compromising either. The principal characteris tics are a movable aperture which changes the input aperture of a cyli ndrical mirror analyzer when operating with the different methods. Ion sources provide 0.5-5 keV beams of inert gases with a current density of 10-500 muA/cm2 when the beam diameter is 200 mum. The ion sources are used both for the surface analysis and for layer-by-layer sputteri ng. A built-in electron gun analyses the surface by Auger spectroscopy with a high surface resolution. The electron beam provided by the gun is 5 mum in diameter and has an energy of 5 keV. The equipment can me asure process and interpret the spectra.