A SIMPLE DYNAMIC PIEZOELECTRIC X-Y TRANSLATION STATE SUITABLE FOR SCANNING PROBE MICROSCOPES

We describe a novel XY micropositioning stage which operates using a s ingle piezoelectric actuator to produce slip-stick motion. The stage c an be moved in steps as small as 20 nm over an area of 9 mm X 9 mm, at translation speeds of up to 0.5 mm/s. Cross coupling between axes is negligible, and the threshold voltage for movement is typically 10 V o r less. The device is simple in construction and requires no precision components. The stage is small and robust, requires no mechanical con nections, and offers the unique advantage in scanning tunneling micros copy and atomic force microscopy applications of being able to provide a Z displacement of some microns.