A LOW-PROFILE MOLECULAR-BEAM SOURCE ISOLATION VALVE FOR ULTRAHIGH-VACUUM APPLICATIONS

Authors
CHABAN EE REUTTROBEY JE
Citation
Ee. Chaban et Je. Reuttrobey, A LOW-PROFILE MOLECULAR-BEAM SOURCE ISOLATION VALVE FOR ULTRAHIGH-VACUUM APPLICATIONS, Review of scientific instruments, 64(8), 1993, pp. 2391-2392
Citations number
NO
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
64
Issue
8
Year of publication
1993
Pages
2391 - 2392
Database
ISI
SICI code
0034-6748(1993)64:8<2391:ALMSIV>2.0.ZU;2-S
Abstract
We describe the design of a novel low-profile valve to isolate a molec ular beam source from an ultrahigh vacuum system. The valve thickness is simply the thickness of a standard double-sided Conflat flange, on which the valve gate and actuation mechanism are assembled in a fully recessed configuration. The valve gate can accommodate a skimmer and/o r several source collimating apertures. The manual actuator is mounted radial to the Conflat flange.