A LONG-RANGE CAPACITIVE DISPLACEMENT SENSOR HAVING MICROMETER RESOLUTION

Authors
BONSE MHW ZHU F VANBEEK HF
Citation
Mhw. Bonse et al., A LONG-RANGE CAPACITIVE DISPLACEMENT SENSOR HAVING MICROMETER RESOLUTION, Measurement science & technology, 4(8), 1993, pp. 801-807
Citations number
5
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
4
Issue
8
Year of publication
1993
Pages
801 - 807
Database
ISI
SICI code
0957-0233(1993)4:8<801:ALCDSH>2.0.ZU;2-B
Abstract
This paper describes a capacitive displacement sensor using the spatia l sampling principle. A first experimental prototype has been manufact ured. Measurements show that this prototype achieves a resolution of 1 mum and an accuracy of 3 mum over a displacement of 150 mm. The linea r displacement range can be as large as several metres. The prototype confirms low sensitivity to both alignment inaccuracies and external i nfluences like dust and electromagnetic disturbances.