AN OPTICAL-FIBER THIN-FILM THICKNESS MONITOR

Authors
CARANTO NRY KADDU SC SZAJMAN J MURPHY MM COLLINS SF BOOTH DJ
Citation
Nry. Caranto et al., AN OPTICAL-FIBER THIN-FILM THICKNESS MONITOR, Measurement science & technology, 4(8), 1993, pp. 865-869
Citations number
5
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
4
Issue
8
Year of publication
1993
Pages
865 - 869
Database
ISI
SICI code
0957-0233(1993)4:8<865:AOTTM>2.0.ZU;2-#
Abstract
A simple and easily calibrated thin film thickness monitor involving o ptical fibre components is described. Film thickness was determined by monitoring the return power via a 2 x 2 directional coupler arrangeme nt. This optical fibre monitor was used to calibrate a conventional qu artz crystal microbalance.