RELATIONSHIP AMONG REFLECTANCE-DIFFERENCE SPECTROSCOPY, SURFACE PHOTOABSORPTION, AND SPECTROELLIPSOMETRY

Authors
HINGERL K ASPNES DE KAMIYA I FLOREZ LT
Citation
K. Hingerl et al., RELATIONSHIP AMONG REFLECTANCE-DIFFERENCE SPECTROSCOPY, SURFACE PHOTOABSORPTION, AND SPECTROELLIPSOMETRY, Applied physics letters, 63(7), 1993, pp. 885-887
Citations number
23
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
63
Issue
7
Year of publication
1993
Pages
885 - 887
Database
ISI
SICI code
0003-6951(1993)63:7<885:RARSSP>2.0.ZU;2-1
Abstract
From the reflectance expressions for a thin biaxial layer on an isotro pic substrate we relate reflectance-difference spectroscopy (RDS), sur face photoabsorption (SPA), and spectroellipsometry. Using these resul ts and our recently acquired RD database, we determine surface reconst ructions present during flow-modulated organometallic chemical vapor g rowth of epitaxial GaAs from SPA data that were published by others.