RADIO-FREQUENCY DISCHARGE MODELING - MOMENT EQUATIONS APPROACH

A fluid model based on the three moments of the Boltzmann equation is presented to study rf discharges. With rate constants obtained from a zero-dimensional Boltzmann equation solver, the model is shown to repr oduce excitation wave forms seen in experiments. Several other critica l features previously reported by particle-in-cell simulations such as mechanisms of heating and relation between electron power deposition and ionization have also been reproduced. A parametric study for a 13. 56-MHz argon discharge with varying rf bias and pressure has been used to derive scaling laws for the discharge.