POLYIMIDE ABLATION USING INTENSE LASER-BEAMS

Authors
SOBEHART JR
Citation
Jr. Sobehart, POLYIMIDE ABLATION USING INTENSE LASER-BEAMS, Journal of applied physics, 74(4), 1993, pp. 2830-2833
Citations number
28
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
74
Issue
4
Year of publication
1993
Pages
2830 - 2833
Database
ISI
SICI code
0021-8979(1993)74:4<2830:PAUIL>2.0.ZU;2-5
Abstract
The ablation of polyimide by intense UV laser beams is modeled with a photothermal process that considers the shielding of the laser beam by the decomposed polymer. The heating of the decomposed material may dr ive the polymer degradation process for fluences above several J/cm2.