STATE-OF-THE-ART OF HIGH-VACUUM SPUTTER-DEPOSITION OF NUCLEAR ACCELERATOR TARGETS

Authors
MAIER HJ FRIEBEL HU FRISCHKE D GROSSMANN R
Citation
Hj. Maier et al., STATE-OF-THE-ART OF HIGH-VACUUM SPUTTER-DEPOSITION OF NUCLEAR ACCELERATOR TARGETS, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 334(1), 1993, pp. 137-141
Citations number
4
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
334
Issue
1
Year of publication
1993
Pages
137 - 141
Database
ISI
SICI code
0168-9002(1993)334:1<137:SOHSON>2.0.ZU;2-P
Abstract
Experience using a high vacuum sputter deposition system over a two ye ar period has shown it to be a reliable, economical way to prepare iso topically enriched targets. The present paper gives a survey of the ma ny types of samples prepared so far and in some detail deals with the problem of impurities related to the procedure and their possible elim ination.