A. Meens et al., PURITY OF TARGETS PREPARED ON CU SUBSTRATES, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 334(1), 1993, pp. 200-202
The purity of several elemental self-supporting targets usually prepar
ed by evaporation onto soluble Cu substrates has been studied. The tar
gets were analysed by Rutherford backscattering and instrumental neutr
on activation analysis. Because of the high percentage of Cu observed
in some Si targets, further measurements, including transmission elect
ron microscopy, have been performed on Si targets deposited by e-gun b
ombardment onto Cu and ion-beam sputtering onto betaine.