AUTOMATIC-MEASUREMENT OF THICKNESS AND UNIFORMITY OF THIN-FILMS BY A COMPUTER-AIDED DEVICE

Authors
DELLERA P GADIOLI E GUAZZONI P VERGANI P ZETTA L
Citation
P. Dellera et al., AUTOMATIC-MEASUREMENT OF THICKNESS AND UNIFORMITY OF THIN-FILMS BY A COMPUTER-AIDED DEVICE, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 334(1), 1993, pp. 211-216
Citations number
3
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
334
Issue
1
Year of publication
1993
Pages
211 - 216
Database
ISI
SICI code
0168-9002(1993)334:1<211:AOTAUO>2.0.ZU;2-D
Abstract
A computer aided vacuum chamber for the automatic determination of thi ckness and uniformity of tip to 44 thin films (on a frame of 50 x 50 m m2) using the energy loss method is described.