This paper presents a detailed three-dimensional analysis for the mode
lling of the photoreflectance effect, in particular the response of la
yered. samples is considered. The dependence of the photoreflectance s
ignal on various parameters such as lifetime, surface recombination ve
locity and carrier diffusion coefficient is discussed. It is shown tha
t the carrier diffusion coefficient and the thermal diffusivity play a
n important role in determining the signal level from the photoreflect
ance system. The effects of the wavelength of the pump and probe beams
are also discussed. Furthermore, a last numerical algorithm, allowing
for a rapid computational evaluation, has been applied.