The photon stimulated ion desorption (PSID) of H2O on the Si(100) surf
ace has been studied in the photon energy region of 500-750 eV. Not on
ly H+ but also O+ ion was observed. PSID yield curves of these ions in
dicate characteristic behavior near and above the 0 K edge; H+ ion exh
ibits sharp rises at ca. 530 eV and two broad peaks below (ca. 533 eV)
and above (ca. 555 eV) the O K-edge, O+ exhibits a delayed threshold
at ca. 570 eV and gradual increase up to 700 eV. The O KVV auger elect
ron yield curve, the photoion-photoion coincidence spectrum and the ga
s-phase photofragment ion spectrum have also been obtained and compare
d with the PSID curves. The results are consistent with a mechanism of
formation of multiple charged OH(m+) (m greater-than-or-equal-to 3) i
ons followed by reneutralization of the excess of charge with strong i
nteractions with the substrate and finally desorption as single charge
d H+ and O+ ions.