X-RAY-ABSORPTION FINE-STRUCTURE STUDIES ON AN AMORPHOUS LANI5.0 FILM PREPARED BY REACTIVE SPUTTERING

The local structure of amorphous LaNi5.0 films prepared by reactive sp uttering was investigated using XAFS and was compared with that by con ventional sputtering. The interatomic distances and coordination numbe rs of both films coincided. The structural fluctuation was, however, f ound to be smaller for the reactive sputtered film than for the conven tional sputtered film, because small Debye-Waller factors were obtaine d for the reactive sputtered film.