EFFECT OF ELECTRON-TEMPERATURE ON NEGATIVE HYDROGEN-ION PRODUCTION INA LOW-PRESSURE AR DISCHARGE PLASMA WITH METHANE

Authors
IIZUKA S KOIZUMI T TAKADA T SATO N
Citation
S. Iizuka et al., EFFECT OF ELECTRON-TEMPERATURE ON NEGATIVE HYDROGEN-ION PRODUCTION INA LOW-PRESSURE AR DISCHARGE PLASMA WITH METHANE, Applied physics letters, 63(12), 1993, pp. 1619-1621
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
63
Issue
12
Year of publication
1993
Pages
1619 - 1621
Database
ISI
SICI code
0003-6951(1993)63:12<1619:EOEONH>2.0.ZU;2-3
Abstract
Production of negative hydrogen ions (H-) is continuously controlled i n a low-pressure Ar discharge plasma with methane by using a pin-hollo w cathode. The electron temperature is changed by varying the pin leng th. An enhanced production of negative hydrogen ions is observed with a decrease in the electron temperature.