LOW-THRESHOLD VERTICAL-CAVITY SURFACE-EMITTING LASERS BASED ON HIGH-CONTRAST DISTRIBUTED BRAGG REFLECTORS

Data are presented on vertical-cavity surface-emitting lasers that use high contrast distributed Bragg reflectors on both sides of the cavit y. The upper reflector consists of a six pair ZnSe/MgF quarter-wave st ack, while the lower reflector consists of an eleven pair AlxOy/GaAs s tack fabricated using selective oxidation. Strain due to the lower ref lector is reduced by using AlxOy layers of less than a quarter-wave th ickness. Device sizes ranging from 1 to 7 mu m diameters are character ized, with a minimum threshold current of 53 mu A. (C) 1997 American I nstitute of Physics.