A spatially resolved optical diagnostic for GaCl is described. The tec
hnique uses 248-nm excimer laser radiation to photolyze GaCl and also
to excite fluorescence in the resulting gallium atoms. This yields gal
lium fluorescence at 245, 266, 287, 294, 403, and 417 nm. The method i
s specific to GaCl and is not affected by the presence of a GaCl3 prec
ursor. Gallium fluorescence is linear in both the GaCl partial pressur
e and the laser energy under specified conditions. The photophysics of
this process are contrasted to related GACl studies of dissociative e
xcitation at 193 nm.