NUMERICAL-SIMULATION OF ECR PLASMA SOURCES

The available electron cyclotron resonance plasma source has been simu lated in two-dimensional configuration space (z,gamma) and three-dimen sional velocity space (V-z, V(g)amma, V theta). Using a hybrid model, we treat ions as particles and electrons as fluid. The motion of ions and electrons is determined by external magnetic field and self-consis tent electrostatic field. For a given magnetic distribution, the spati al profiles of electron temperature, plasma potential, plasma density and ionization rate have been obtained. The influences of microwave po wer, neutral gas pressure and magnetic field on plasma parameters have been studied. The comparisons between simulation and experimental res ults are made and the explanations for some physical phenomena are giv en.