COMPOSITIONAL INVESTIGATION OF SPUTTERED AMORPHOUS SIOX-H

The composition of magnetron sputtered a-SiOx:H (oxygen content = 18 . .. 67 at%, hydrogen content = 3 ... 15 at%) has been studied using inf rared transmission spectroscopy, Rutherford backscattering, elastic re coil detection and microprobe analysis. The preferred bonding configur ation of oxygen in the amorphous matrix is being studied. The integrat ed absorption of the Si-O-Si stretching mode around 1000 cm-1 is being calibrated to the oxygen content determined by the other methods. The comparison with results of other authors reveals an oxygen content de pendence of the preintegral factor of this vibrational mode. A calibra tion constant for the prevailing oxygen mode is given for the concentr ation range of 20 to 55 at%.