COMPOSITIONAL INVESTIGATION OF SPUTTERED AMORPHOUS SIOX-H

Citation
F. Stolze et al., COMPOSITIONAL INVESTIGATION OF SPUTTERED AMORPHOUS SIOX-H, Solid state communications, 87(9), 1993, pp. 805-808
Citations number
15
Categorie Soggetti
Physics, Condensed Matter
Journal title
ISSN journal
00381098
Volume
87
Issue
9
Year of publication
1993
Pages
805 - 808
Database
ISI
SICI code
0038-1098(1993)87:9<805:CIOSAS>2.0.ZU;2-3
Abstract
The composition of magnetron sputtered a-SiOx:H (oxygen content = 18 . .. 67 at%, hydrogen content = 3 ... 15 at%) has been studied using inf rared transmission spectroscopy, Rutherford backscattering, elastic re coil detection and microprobe analysis. The preferred bonding configur ation of oxygen in the amorphous matrix is being studied. The integrat ed absorption of the Si-O-Si stretching mode around 1000 cm-1 is being calibrated to the oxygen content determined by the other methods. The comparison with results of other authors reveals an oxygen content de pendence of the preintegral factor of this vibrational mode. A calibra tion constant for the prevailing oxygen mode is given for the concentr ation range of 20 to 55 at%.