A COMPACT MICROPOSITIONER FOR USE IN ULTRAHIGH-VACUUM

We have designed and built a low profile compact micropositioner for u se in air or ultrahigh vacuum. The dimensions are 3.1 x 1.0 X 0.75 cm3 with a 1.4 cm range of motion. The device is actuated by two piezoele ctric tubes, and utilizes both stick slip and sequential clamping to a ttain linear motion in one dimension. For motion in two dimensions the flat profile allows units to be stacked. The micropositioner is capab le of climbing an incline of 30-degrees while carrying a 17 g load. It is driven forward by staggered 0-250 V signals with a fast rise time and slow decay time. We obtained step sizes from 30 to 400 nm with sta ndard deviation less than 15 nm, and have demonstrated a maximum avera ge velocity of 0.14 mm/s.