A TECHNIQUE FOR ELIMINATING WHITE PHOSPHORUS DEPOSITS IN VAPOR-PHASE EPITAXY SYSTEMS

Authors
WILT DM HOFFMAN RW
Citation
Dm. Wilt et Rw. Hoffman, A TECHNIQUE FOR ELIMINATING WHITE PHOSPHORUS DEPOSITS IN VAPOR-PHASE EPITAXY SYSTEMS, Review of scientific instruments, 64(9), 1993, pp. 2704-2705
Citations number
2
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
64
Issue
9
Year of publication
1993
Pages
2704 - 2705
Database
ISI
SICI code
0034-6748(1993)64:9<2704:ATFEWP>2.0.ZU;2-0
Abstract
A technique of heating the exhaust lines is described whereby phosphor us in the exhaust portion of an organometallic vapor phase epitaxy rea ctor is encouraged to deposit in the red form rather than the pyrophor ic white form. This technique is simple, effective, and does not hinde r or limit the conditions under which the reactor may be operated.