Despite the rapid progress being made in the synthesis of diamond film
s and recent interest in polishing of diamond films, no systematic mea
surements of friction and wear on polished diamond films have been rep
orted. In the present study, chemomechanical and laser polishing techn
iques are used, and friction and wear data on the chemomechanically po
lished diamond films are presented. With the chemomechanical polishing
technique used in this study, the rms roughness of hot filament chemi
cal vapor deposited diamond films can be reduced from about 657 to abo
ut 170 nm with rounding off of sharp asperities with no change in the
diamond structure. The polished films exhibit coefficient of friction
(approximately 0.1) and wear rates much lower than that of unpolished
films. Friction and wear properties of the polished films are comparab
le to that of single-crystal natural diamond. Based on this study, it
is concluded that polished films are potential candidates for tribolog
ical applications.