CONTRIBUTION OF BACKSCATTERED IONS IN SPUTTERING OF NON-ORDERED MATERIALS

The contribution of back-scattered light ions to the sputtering of sol ids at normal ion bombardment is investigated using the solution of a matrix integral cascade equation. It is shown that the contribution of the incoming beam and that of back-scattered particles are comparable if upper estimations of back-scattering coefficients, taken from expe riments and Monte-Carlo calculations, are used. If the mean estimation s of these coefficients are used, the contribution from back-scattered particles is significantly less than that from the primary beam.