OPTICAL-CONSTANTS OF REACTIVELY-SPUTTERED NBN FILMS

Authors
KONEVECKI MW WESTRA KL SULLIVAN BT KORNELSON KE BRETT MJ
Citation
Mw. Konevecki et al., OPTICAL-CONSTANTS OF REACTIVELY-SPUTTERED NBN FILMS, Thin solid films, 232(2), 1993, pp. 228-231
Citations number
17
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
232
Issue
2
Year of publication
1993
Pages
228 - 231
Database
ISI
SICI code
0040-6090(1993)232:2<228:OORNF>2.0.ZU;2-#
Abstract
Niobium nitride films of nominal thickness 1 mum and superconducting c ritical temperature of 14 K were prepared by reactive d.c. magnetron s puttering. A spectroellipsometer was used to measure the pseudo-dielec tric constant [epsilon] over the spectral interval 1.5-5.0 eV for film s prepared at different nitrogen flow rates. Spectrophotometer measure ments of film reflectivity were made, which confirmed the ellipsometer results.