CAPACITIVE THIN-FILM GAS SENSOR WITH SIGNAL-PROCESSING SYSTEM FOR DETERMINATION OF SO2

Authors
LIN J OBERMEIER E
Citation
J. Lin et E. Obermeier, CAPACITIVE THIN-FILM GAS SENSOR WITH SIGNAL-PROCESSING SYSTEM FOR DETERMINATION OF SO2, Sensors and actuators. B, Chemical, 16(1-3), 1993, pp. 319-322
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
16
Issue
1-3
Year of publication
1993
Pages
319 - 322
Database
ISI
SICI code
0925-4005(1993)16:1-3<319:CTGSWS>2.0.ZU;2-P
Abstract
The SO2 gas sensor presented consists of a thin film capacitor with an SO2-sensitive dielectric and a signal processing circuit constructed on the basis of SC technology (i.e. using switched capacitor technique s) making use of hybrid technology. The measuring limit of the sensor developed lies between the MAK value (MAK value Of SO2: 2 vpm). The se nsors described are distinguished by good reproducibility and reversib ility, short response time ( < 20 s) and low cross-sensitivity to othe r gases. A battery-powered measuring unit was developed for measuremen t Of SO2 at changing locations of use.