A NEW SNO2 LOW-TEMPERATURE DEPOSITION TECHNIQUE FOR INTEGRATED GAS SENSORS

A new SnO2 low temperature deposition technique for integrated gas sen sors is presented. Two different film thicknesses are investigated, as well as different catalysts. A correlation is established between the deposition parameters, the texture of the layers and the gas sensitiv ities. An explanation for the quite different behaviours of these laye rs is proposed. The best results are obtained with the thinner film ga s sensors, for which Schottky barriers are formed between grains after thermal oxidation. A comparison between these integrated gas sensors and conventional sintered ones shows the major advantages of the integ rated sensors.