Schottky barrier height fluctuations of Au films on Si(100) are direct
ly imaged with nm-scale resolution by ballistic electron emission. Flu
ctuations are made visible by using a highly doped (N(d) almost-equal-
to 10(17) cm-3) substrate. Randomly distributed (approximately 10(13)
cm-1) spots (about 2 nm in diameter) of reduced barrier height (typica
l DELTAPHI=20-50 meV) are observed. The microscopic distribution of ba
rrier heights effective in emission is consistent with mean barrier he
ight values measured by standard techniques.