F. Flory et al., ANISOTROPY IN THIN-FILMS - MODELING AND MEASUREMENT OF GUIDED AND NONGUIDED OPTICAL-PROPERTIES - APPLICATION TO TIO2 FILMS, Applied optics, 32(28), 1993, pp. 5649-5659
The main purpose of this research is to study the anisotropic behavior
of dielectric material in thin-film form. First we present a theory b
ased on a 4 x 4 transfer matrix linking tangential components of the e
lectromagnetic field on one interface to the tangential components of
the electromagnetic field on the other interface of an anisotropic thi
n film. A biaxial model is associated with the columnar structure of t
he layer. The comparison between measurements of the transmission in n
ormal incidence in cross-polarized light and of guided-mode propagatio
n constants with the calculations allows us to study the biaxial behav
ior of TiO2 films. The excellent consistency between measurements and
computations demonstrates the validity of the model based on the colum
nar structure.