Diffusion of water into silica glass has been studied at low temperatu
res. Hydrothermal treatments were made with water of normal isotopic c
omposition and water enriched in O-18. Hydrogen and O-18 concentration
profiles were measured employing nuclear reaction analysis. After sho
rt-term treatments (5 to 20 h) at temperatures between 100 and 200-deg
rees-C, the concentration ratio [O-18]/[H] was found to be 0.5. This a
llows the conclusion that water molecules are the diffusing species. D
iffusion coefficients deduced from the profiles are D almost-equal-to
3 . 10(-13) cm2/s at 200-degrees-C and D almost-equal-to 6 . 10(-15) c
m2/s at 100-degrees-C; the corresponding activation energy is about 58
kJ/mol. The near-surface concentration of hydrogen and O-18 increased
with treatment time and temperature, indicating a non-equilibrium sta
te. After long-term treatments (6 to 20 d) at 200-degrees-C, the near-
surface concentration of hydrogen was found to have a nearly constant
value of 7 . 10(20) atoms/cm3, and [O-18]/[H] ratios up to 1.7 were ob
served. It was concluded that an equilibrium or near-equilibrium state
with regard to the concentrations of H2O molecules and SiOH groups ha
d been reached, the SiOH groups being formed by (reversible) reactions
of H2O molecules with the SiO2 network. These findings are discussed
in the framework of the diffusion model of Doremus.