OPTICAL-PROPERTIES OF GAAS(001) SURFACE DURING DESORPTION OF AS ATOMS

Authors
SAKAMOTO A OTAKE S IWASA I
Citation
A. Sakamoto et al., OPTICAL-PROPERTIES OF GAAS(001) SURFACE DURING DESORPTION OF AS ATOMS, JPN J A P 2, 32(9B), 1993, pp. 120001318-120001320
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
32
Issue
9B
Year of publication
1993
Pages
120001318 - 120001320
Database
ISI
SICI code
Abstract
The surface photoabsorption (SPA) signal from the GaAs (001) surface w as measured at the angle of incidence between 69-degrees and 83-degree s. We found two processes of As desorption during H-2 purge after AsH3 injection. The SPA signals for the two processes had different time c onstants and different angle dependence. The angle dependence indicate d that the change of the SPA signal was due to both the optical absorp tion of the surface and the refractive index change of the surface lay er.