The localization of electrode reactions in a focused laser beam is com
pared to other localization techniques such as photolithography or the
application of catalysis and inhibition. The geometric resolution of
the reactions is given by primary effects of the laser spot and second
ary effects of the system (light scattering, thermal and electronic co
nductivity). A combination of several localization methods is favourab
le. Tests with natural (Ti) and artificially simulated (Ti/TiN) grain
boundaries show a resolution of some mum, close to the theoretical res
olution, as long as low power densities are used. Some progress has be
en achieved by full coordination of observation with localized laser r
adiation. Most of the localized reactions studied are based on photo-e
lectrochemical processes at thin n-type semiconducting films, but loca
lized photochemical copper deposition onto quartz is also presented. Q
uantitative investigations are carried out with laser-induced Ag-depos
ition onto anodic TiO2 layers as an example. Experiments with point ar
rays as well as velodynamic experiments prove that optically visible s
pots can be obtained after a minimum consumption of some 10(17) e cm-2
. With increasing power density the reaction becomes delocalized by se
condary effects. Depending on the illumination time, i.e. the number o
f photons absorbed, competition between laser-induced oxide growth and
metal deposition was observed on Nb2O5 layers. Substrate influences a
re demonstrated by various examples. Long-range effects are caused by
charge-carrier migration. Furthermore, crystallization is induced far
away from the laser spot.