THEORETICAL CALCULATIONS OF THE BROADENING OF DILUTE SI, AL AND BE DOPED-DELTA - LAYERS IN GA AS DURING SIMS DEPTH PROFILING (VOL 44, PG 331, 1993)/

Authors
BADHEKA R VANDENBERG JA ARMOUR DG WADSWORTH M
Citation
R. Badheka et al., THEORETICAL CALCULATIONS OF THE BROADENING OF DILUTE SI, AL AND BE DOPED-DELTA - LAYERS IN GA AS DURING SIMS DEPTH PROFILING (VOL 44, PG 331, 1993)/, Vacuum, 44(10), 1993, pp. 1073-1073
Citations number
1
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
44
Issue
10
Year of publication
1993
Pages
1073 - 1073
Database
ISI
SICI code
0042-207X(1993)44:10<1073:TCOTBO>2.0.ZU;2-E