THERMAL BASE DRIVE FOR MICROMECHANICAL RESONATORS EMPLOYING DEEP-DIFFUSION BASES

A novel approach of thermal excitation is presented, where thin microm echanical structures are suspended by deep-diffusion bases. Cantilever s and microbridges are fabricated, modeled and tested. Resonance frequ encies are solely determined by the thin parts of the structures, and are independent of material properties and dimensions of the base. The efficiency for the amplitude of vibration is independent of the thick ness and length of the base. Therefore short and thick bases can be ap plied, leading to relatively small temperature elevations inherent to thermal excitation.