MICRO-LIQUID FLOW SENSOR

Authors
LAMMERINK TSJ TAS NR ELWENSPOEK M FLUITMAN JHJ
Citation
Tsj. Lammerink et al., MICRO-LIQUID FLOW SENSOR, Sensors and actuators. A, Physical, 37-8, 1993, pp. 45-50
Citations number
12
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
37-8
Year of publication
1993
Pages
45 - 50
Database
ISI
SICI code
0924-4247(1993)37-8:<45:MFS>2.0.ZU;2-W
Abstract
A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer princi ples. An analytical model for the sensor behaviour applicable for gas/ liquid fluids is presented. The realisation process of the sensor is d escribed. Model and experimental results agree well. The sensor is sim ple to integrate with other micro-liquid handling components such as p umps, mixers, etc.