HIGH-TEMPERATURE THIN-FILM STRAIN-GAUGES

Citation
P. Kayser et al., HIGH-TEMPERATURE THIN-FILM STRAIN-GAUGES, Sensors and actuators. A, Physical, 37-8, 1993, pp. 328-332
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
ISSN journal
09244247
Volume
37-8
Year of publication
1993
Pages
328 - 332
Database
ISI
SICI code
0924-4247(1993)37-8:<328:HTS>2.0.ZU;2-H
Abstract
To respond to the industrial interest of aeroengine manufacturers in c arrying out instrumentation techniques for blade vibration measurement s, ONERA is developing thin-film resistance strain gauges suitable for dynamic stress measurements up to 900-degrees-C. The strain gauge, de posited by r.f. sputtering onto nickel-based superalloys, is described . It consists of a NiCoCrAlY coating, insulating layer (Al2O3), sensin g layer (NiCr, PdCr), intermediate splicing layer (Pt) and a protectiv e film (Al2O3 or SiO2). The masking of the layers, the splicing of the thin films to wires and the deposition technique on complex three-dim ensional structures are presented. The first electrical and mechanical properties of the sensing layers are described, as well as preliminar y results concerning the thermal stability of the gauges.