J. Defrutos et F. Lopez, THIN-FILM SEMICONDUCTOR ELECTRODES DEPOSITED ON PYROELECTRIC CERAMICS- APPLICATION TO COMPACT SPECTRALLY SELECTIVE PYROELECTRIC IR SENSORS, Sensors and actuators. A, Physical, 37-8, 1993, pp. 507-511
Ferroelectric materials like lead calcium titanate ceramics have been
demonstrated to be excellent materials for pyroelectric detectors. The
y are usually covered with electroded black gold. This material is ext
ensively used to obtain both a fair IR absorption and a good electrica
l contact. Spectrally selective compact IR sensors for specific applic
ations could be obtained by means of vacuum deposition on the pyroelec
tric substrate of the specific multilayer IR filter. However, very smo
oth substrates are required for proper adhesion of the multilayer, whi
ch is not the case for black gold layers. Besides, these layers do not
possess the optical properties required in the filter's design and de
velopment process. Semiconductors like germanium or silicon are typica
l IR optical materials widely used in optical multilayers. Vacuum-evap
orated Ge thin films have been deposited onto pyroelectric lead calciu
m titanate ceramics. In this work, a new system to improve the perform
ance of lead calcium titanate ceramics for an infrared sensor is propo
sed. Studies have also been performed in order to establish the behavi
our of this material as both an electrode and first layer. The feasibi
lity of obtaining compact spectrally selective pyroelectric IR sensors
has also been proved.